a lot of good advices here, The key point is you need to know what's going on while cleaning. Use a loupe with LED light(I attached some sensor protection sponge on loupe_this is a good tool for the lens cleaning too) to see the sensor. I use the newer Visible Dust flat! LED loupe which was modified with small sponge to protect sensor. You don't want to damage sensor while using the loupe. I like, a blower with hepa(!!) filter(the other blowers are useless for sensor cleaning since it adds dust while removing the dust), butterfly brush( clean the brush itself often_this brush is good for medium digital back only. For the small camera, I don't recommend this because of oils near the sensor.), (sometimes) solution B or Eclipse, or E-wipe. And following Jack's advice long ago, I use fresh very small piece of optical cleaning cloth(leica brand for now) to remove any residue on the edge of sensor for only one-time use. You can make about 10 small pieces from one cleaning cloth.You don't need to be a Master of sensor cleaning to clean a sensor : ) Leaf_mamiya wipe pad sounds better than phaseone or B&H's. I'll try it next time. The key is the fact that you need to see what you are doing without guessing. Good luck! It sounds like complicated, but it is a kind of fun and a good lesson
To solve a problem, you need a thorough understanding... And of course, peace of mind finally. With a thorough understanding, it's easier to compromise some. It's ok to use 95% clean sensor as long as you know that it's 95% and you can make it 100% if needed. I know...it's not cheap..